Cheng-Yang Chang
This course will provide the beginners with a deeper understanding of CMOS MEMS from the design end to the process end. By means of TSRI's CMOS MEMS platform flow, students will have a clearer understanding of the CMOS MEMS system flow.
1. Preview of MEMS technology
2. TSRI CMOS MEMS Process
3. Layout of the MEMS Structure
4. Applications of CMOS MEMS technology
5. Characterizing the MEMS devices
6. Simulation of a MEMS device by CoventorWare
7. Appendix
Aout TSRI
The Taiwan Semiconductor Research Institute (TSRI) under the National Applied Research Laboratories (NARLabs) is a consolidation of the National Chip Implementation Center (CIC) and National Nano Device Laboratories (NDL). An integrated research environment for related fields of study in Taiwan is urgently required to enhance the overall cultivation of quality talents in response to the introduction of the 3-nm node; rapid development of new applications (e.g., artificial intelligence, quantum computers, next-gen magnetic random access memory, high-speed computers, and 5G network); and challenges posed by countries including European countries, the United States, Japan, and South Korea.